Solid-state amorphization in Al–Pt thin films
- 1 October 1988
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 3 (5) , 884-889
- https://doi.org/10.1557/jmr.1988.0884
Abstract
Solid-state amorphization is reported to occur in aluminum-platinum thin films. A uniform amorphous alloy layer was observed at the interface between aluminum and platinum layers for electron beam evaporated samples in an as-deposited state. For a pure aluminum overlayer deposited on top of a coevaporated Al–Pt amorphous alloy, the aluminum dissolves into the amorphous phase leading to a fully amorphous sample. In this last case the amorphization is nonuniform upon low-temperature anneals (T < ≃2 200 °C) and gives rise to hole formation in the aluminum overlayer. Direct observations of this phenomenon during in situ annealing of the thin films in a transmission electron microscope were carried out.Keywords
This publication has 11 references indexed in Scilit:
- Study of the initial aluminide phase growth in Al/Pt couplesThin Solid Films, 1987
- Interfacial reaction-induced morphological instabilities in thin Al/Pt and Al/Pd filmsJournal of Materials Research, 1987
- Phase formation and dissociation in the thin-film Pt/Al systemJournal of Applied Physics, 1987
- Void formation in thin Al filmsApplied Physics Letters, 1987
- Calibration of an energy dispersive spectroscopy k factor using Rutherford backscatteringJournal of Vacuum Science & Technology A, 1985
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Phase formation by ion beam mixing in Ni/Al, Pd/Al, and Pt/Al bilayersApplied Physics Letters, 1983
- Formation of an Amorphous Alloy by Solid-State Reaction of the Pure Polycrystalline MetalsPhysical Review Letters, 1983
- Thin-film interaction in aluminum and platinumJournal of Applied Physics, 1976
- The quantitative analysis of thin specimensJournal of Microscopy, 1975