Hard coatings (TiN, TixAl1−xN) deposited at room temperature by energetic cluster impact
- 1 March 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 100-101, 27-32
- https://doi.org/10.1016/s0257-8972(97)00583-5
Abstract
No abstract availableKeywords
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