Characterization of a CH4-RF-plasma by ion flux, Langmuir probe, and optical emission spectroscopy measurements
- 25 March 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (2-4) , 121-126
- https://doi.org/10.1016/0925-9635(92)90010-l
Abstract
No abstract availableKeywords
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