Optical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition
- 14 July 1990
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 23 (7) , 799-805
- https://doi.org/10.1088/0022-3727/23/7/008
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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