Surface mechanisms in the UVCVD of SiO2 films
- 1 January 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 54, 445-452
- https://doi.org/10.1016/0169-4332(92)90085-c
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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