The mechanism of N-H bond decomposition in silicon nitride films
- 1 December 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 74 (2) , 287-293
- https://doi.org/10.1016/0040-6090(80)90092-9
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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