Quantitative analysis of complex targets by proton-induced x rays

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Abstract
We have explored the potential of proton‐induced x‐ray spectroscopy as a quantitative analytical technique to determine the composition of a homogeneous complex target. Direct production of x ray by protons in the low MeV range was considered using the binary encounter approximation and published data on the atomic number dependance of the stopping power. Also included is a correction scheme for secondary excitation processes if radiation is generated in the target capable of fluorescence excitation. The formalism of the correction scheme is closely related to the one commonly employed in electron microprobe spectroscopy. Our data indicate that the accuracy achievable in IIXS is of the order of ±5%, if one considers the two important corrections: (1) the difference in the stopping power properties of the composite target compared to the pure element target; (2) secondary excitation processes if required.