Hydrogen Incorporation Scheme in Amorphous-Microcrystalline Mixed-Phase Si: H Films
- 1 March 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (3A) , L194
- https://doi.org/10.1143/jjap.22.l194
Abstract
Silicon-hydrogen alloy films containing both microcrystalline phase and amorphous phase (µc-Si: H) are prepared by sputtering, magnetron sputtering and glow-discharge methods. Results of NMR measurements for hydrogen in µc-Si: H are qualitatively similar to those in amorphous silicon-hydrogen alloy films except that hydrogens are easy to move and exhibit the motional narrowing effect. There seems to be little possibility of presence of a large amount of non-bonded hydrogens such as hydrogen molecules or atomic hydrogens.Keywords
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