Microstructure and initial growth characteristics of the low temperature microcrystalline silicon films on silicon nitride surface
Open Access
- 1 July 2001
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 90 (1) , 217-221
- https://doi.org/10.1063/1.1378334
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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