Hydrogenated amorphous Si-C alloy prepared by chemical vapour deposition
- 1 October 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 164, 213-216
- https://doi.org/10.1016/0040-6090(88)90137-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Chemical vapor deposition of hydrogenated amorphous siliconJournal of Applied Physics, 1986
- Hydrogenated Amorphous Silicon Produced by Pyrolysis of Disilane in a Hot Wall ReactorJapanese Journal of Applied Physics, 1984
- Properties and structure of a-SiC:H for high-efficiency a-Si solar cellJournal of Applied Physics, 1982