A mass spectrometric study of the simultaneous reaction mechanism of TMIn and PH3 to grow InP
- 1 October 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 92 (3-4) , 605-615
- https://doi.org/10.1016/0022-0248(88)90045-0
Abstract
No abstract availableKeywords
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