The Application of Low Angle Rutherford Backscattering to Surface Layer Analysis
- 1 January 1976
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- The optimization of a rutherford backscattering geometry for enhanced depth resolutionNuclear Instruments and Methods, 1975
- Range parameters of heavy ions at 10 and 35 keV in siliconPhysics Letters A, 1975
- The measurement of Pb+ ion collection in Si by high depth-resolution Rutherford backscatteringPhysics Letters A, 1975
- On the annealing of damage produced by copper ion implantation of silicon single crystalsRadiation Effects, 1974
- Line-shape extraction analysis of silicon oxide layers on silicon by channelling effect measurementsThin Solid Films, 1973
- Principles and applications of ion beam techniques for the analysis of solids and thin filmsThin Solid Films, 1973
- An application of high energy-resolution scattering measurements in channeling studiesRadiation Effects, 1972