Macro/microcavity method and its application in modeling chemical vapor deposition reaction systems
- 1 April 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 365 (2) , 176-188
- https://doi.org/10.1016/s0040-6090(99)01058-5
Abstract
No abstract availableThis publication has 34 references indexed in Scilit:
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