Carbon doping and etching effects of CBr4 during metalorganic chemical vapor deposition of GaAs and AlAs
- 1 February 1997
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 172 (1-2) , 5-12
- https://doi.org/10.1016/s0022-0248(96)00737-3
Abstract
No abstract availableKeywords
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