Conventional contact interconnect technology as an alternative to contact plug (W) technology for 0.85 μm CMOS EPROM IC devices
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 7 (1) , 79-86
- https://doi.org/10.1109/66.286835
Abstract
No abstract availableKeywords
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