Effects of nitrogen/argon ratio on composition and structure of InN films prepared by r.f. magnetron sputtering
- 1 April 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 343-344, 524-527
- https://doi.org/10.1016/s0040-6090(98)01671-x
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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