Absence of negative ion effects during on-axis single target sputter depositions of Y-Ba-Cu-O thin films on Si (100)
- 18 June 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (25) , 2572-2574
- https://doi.org/10.1063/1.102845
Abstract
Stoichiometric thin films of YBa2Cu3O7−δ have been deposited on (100) silicon substrates by on-axis single target magnetron sputtering. The effect of oxygen resputtering was minimized through the use of much stronger than usual magnetic assemblies in the source. A magnet assembly incorporating NdB and NdFeB magnets produced a magnetic field above the target twice as large as the one produced by a standard SmCo magnet assembly. This allows for the use of lower operating voltages and a better electron racetrack confinement, resulting in little or no oxygen resputtering. We have obtained stoichiometric or near-stoichiometric films on silicon both by dc and rf magnetron techniques at a variety of sputtering pressures and target to substrate distances.Keywords
This publication has 11 references indexed in Scilit:
- Effect of a declination angle of substrate position on magnetron sputter deposition from a YBa2Cu3O7−xtargetApplied Physics Letters, 1989
- Influence of Y2O3ZrO2 buffer layers on sputtered films of YBa2Cu3O6+xMaterials Science and Engineering: A, 1989
- Reproducible sputtering and properties of Y-Ba-Cu-O films of various thicknessesJournal of Applied Physics, 1988
- Reliable single-target sputtering process for high-temperature superconducting films and devicesApplied Physics Letters, 1988
- Crystallinity and superconductivity of low temperature synthesized Ln-Ba-Cu-O thin filmsPhysica C: Superconductivity and its Applications, 1988
- Epitaxial Growth of Ba2YCu3Ox Thin Film on Epitaxial ZrO2/Si(100)Japanese Journal of Applied Physics, 1988
- Sputter deposition of YBa2Cu3O6+x on alumina and the influence of ZrO2 buffer layersApplied Physics Letters, 1988
- Sputter deposition of YBa2Cu3O7−y thin filmsApplied Physics Letters, 1987
- Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−x thin filmsApplied Physics Letters, 1987
- Preparation and substrate reactions of superconducting Y-Ba-Cu-O filmsApplied Physics Letters, 1987