Die Erzeugung dünner Schichten. Das PECVD‐Verfahren: Gasphasenabscheidung in einem Plasma
- 1 June 1991
- journal article
- Published by Wiley in Chemie in Unserer Zeit
- Vol. 25 (3) , 148-158
- https://doi.org/10.1002/ciuz.19910250306
Abstract
No abstract availableKeywords
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