Polysilicon Super Thin Film Transistor Technology
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- A Super Thin Film Transistor in Advanced Poly Si FilmsJapanese Journal of Applied Physics, 1986
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- Stochastic model for grain size versus dose in implanted and annealed polycrystalline silicon films on SiO2Journal of Applied Physics, 1985
- Grain Growth and Conductive Characteristics of Super Thin Polysilicon Films by OxidationJapanese Journal of Applied Physics, 1985
- Polysilicon Super-Thin-Film Transistor (SFT)Japanese Journal of Applied Physics, 1984
- Passivation of grain boundaries in polycrystalline siliconApplied Physics Letters, 1979
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975
- Optical Investigation of Different Silicon FilmsJournal of the Electrochemical Society, 1974