Formation of interfacial layers and electrical conduction mechanisms dominating the contact resistivity in refractory metal-Si contacts
- 1 January 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 56-58, 545-550
- https://doi.org/10.1016/0169-4332(92)90286-7
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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