Gas Flow Engineering in Rapid Thermal Processing
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Rapid Thermal Processing: Status, Problems and Options After the First 25 YearsMRS Proceedings, 1993
- Comparison of bipolar NPN polysilicon emitter interface formation at three different manufacturing sitesIEEE Transactions on Semiconductor Manufacturing, 1992
- Published by AIP Publishing ,1991
- Thermal Effects of Gasses in Rapid Thermal ProcessingMRS Proceedings, 1991
- The Effect of Processing Environment on the Lateral Growth of Titanium SilicideJournal of the Electrochemical Society, 1988
- Reaction of Oxygen with Si(111) and (100): Critical Conditions for the Growth of SiO2Journal of the Electrochemical Society, 1982