A Comparative Study of Structure and Residual Stress in Chromium Nitride Films Deposited by Vacuum Arc Evaporation, Ion Plating, and DC Magnetron Sputtering
- 16 December 1996
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 158 (2) , 505-521
- https://doi.org/10.1002/pssa.2211580218
Abstract
No abstract availableKeywords
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