Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping
- 1 January 2002
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 186 (1-4) , 45-51
- https://doi.org/10.1016/s0169-4332(01)00623-7
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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