Cubic nitrides of the sixth group of transition metals formed by nitrogen ion irradiation during metal condensation
- 1 October 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 84 (1-3) , 425-428
- https://doi.org/10.1016/s0257-8972(95)02808-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Low-temperature formation of metastable cubic tantalum nitride by metal condensation under ion irradiationJournal of Applied Physics, 1995
- Nitridation of vanadium by ion beam irradiationSurface and Coatings Technology, 1994
- Ion-beam-assisted deposition of molybdenum nitride filmsSurface and Coatings Technology, 1994
- Basic characteristics of chromium nitride films by dynamic ion beam mixingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Advantages of dynamic ion beam mixingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Ion beam modification of TiN films during vapor depositionMaterials Science and Engineering, 1987
- The preparation and characterization of transition metal nitride filmsJournal of Vacuum Science and Technology, 1982