Characterization of Sputtered AIN Films by Photoelectron Spectroscopy
- 16 April 1993
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 136 (2) , K105-K108
- https://doi.org/10.1002/pssa.2211360237
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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