Cluster size measurement using microtrench in a thermal plasma flash evaporation process
- 1 May 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (3) , 558-565
- https://doi.org/10.1116/1.589292
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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