Ultrahigh vacuum atomic force microscope using a pantograph inchworm mechanism
- 1 December 1993
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (12) , 3524-3529
- https://doi.org/10.1063/1.1144277
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Magnetic force microscope combined with a scanning electron microscopeJournal of Vacuum Science & Technology A, 1993
- Simultaneous Observation of 3-Dimensional Magnetic Stray Field and Surface Structure Using New Force MicroscopeJapanese Journal of Applied Physics, 1992
- Proposal for Device Transplantation using a Focused Ion BeamJapanese Journal of Applied Physics, 1990
- Scanning tunneling microscope with reliable coarse positionersReview of Scientific Instruments, 1989
- An atomic-resolution atomic-force microscope implemented using an optical leverJournal of Applied Physics, 1989
- Novel optical approach to atomic force microscopyApplied Physics Letters, 1988
- Atomic resolution imaging of a nonconductor by atomic force microscopyJournal of Applied Physics, 1987
- Atomic force microscope–force mapping and profiling on a sub 100-Å scaleJournal of Applied Physics, 1987
- Atomic Force MicroscopePhysical Review Letters, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982