Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
- 8 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 60 (1-3) , 493-497
- https://doi.org/10.1016/0257-8972(93)90139-f
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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