Optically excited self-resonant microbeams

This publication has 14 references indexed in Scilit:

• Photothermal excitation and self-excitation of silicon microresonators
  Sensors and Actuators A: Physical, 1993
• Mechanisms of optical activation of micromechanical resonators
  Sensors and Actuators A: Physical, 1992
• Optical micromachined pressure sensor for aerospace applications
  Optical Engineering, 1992
• Optothermal drive of silicon resonators: The influence of surface coatings
  Sensors and Actuators A: Physical, 1990
• Self-excitation in fibre-optic microresonator sensors
  Sensors and Actuators A: Physical, 1990
• Optically excited resonant beam pressure sensor
  Electronics Letters, 1987
• Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensors
  Electronics Letters, 1987
• Temperature dependence of resonant frequency in optically excited diaphragms
  Electronics Letters, 1986
• Optical activation of a silicon vibrating sensor
  Electronics Letters, 1986
• Optically activated vibrations in a micromachined silica structure
  Electronics Letters, 1985