Piezoresistive properties of polysilicon films
- 1 June 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 49 (1-2) , 67-72
- https://doi.org/10.1016/0924-4247(95)01013-q
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Polysilicon strain-gauge transducersSensors and Actuators A: Physical, 1992
- Piezoresistive pressure sensors based on polycrystalline siliconSensors and Actuators A: Physical, 1991
- Polysilicon SOI pressure sensorSensors and Actuators, 1989
- Piezoresistance in polysilicon and its applications to strain gaugesSolid-State Electronics, 1989
- Piezoresistive elements of polycrystalline semiconductor thin filmsSensors and Actuators, 1988
- Piezoresistive properties of polycrystalline and crystalline silicon filmsSensors and Actuators, 1987
- Polycrystalline silicon-on-metal strain gauge transducersIEEE Transactions on Electron Devices, 1983
- Structure and Properties of LPCVD Silicon FilmsJournal of the Electrochemical Society, 1980
- Piezoresistive properties of polycrystalline siliconJournal of Applied Physics, 1976
- Resistivity, mobility and impurity levels in GaAs, Ge, and Si at 300°KSolid-State Electronics, 1968