RBS tomography of SOI structures using a MeV ion microprobe
- 1 January 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 45 (1-4) , 523-526
- https://doi.org/10.1016/0168-583x(90)90891-w
Abstract
No abstract availableKeywords
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- The production and use of a nuclear microprobe of ions at MeV energiesNuclear Instruments and Methods, 1979