Mechanisms of intrinsic stress generation in amorphous carbon thin films prepared by magnetron sputtering
- 1 July 1997
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 6 (9) , 1182-1191
- https://doi.org/10.1016/s0925-9635(97)00025-3
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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