High-speed monolithic receiver OEIC consisting of a waveguide p-i-n photodiode and HEMT's

Abstract
A novel side-illuminated receiver OEIC, consisting of a waveguide p-i-n photodiode and an InAlAs-InGaAs-HEMT transimpedance amplifier, was fabricated by a dry-etching based process. The OEIC has a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 /spl Omega/, which enables it to receive a 10-Gb/s NRZ signal. These results represent a major advance in achieving ultrahigh-speed side-illuminated OEICs for long-wavelength optical interconnection and transmission systems.<>