Mechanical design and optimization of capacitive micromachined switch
Top Cited Papers
- 1 October 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 93 (3) , 273-285
- https://doi.org/10.1016/s0924-4247(01)00662-8
Abstract
No abstract availableKeywords
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