Preparation of Al–Pd–Mn Quasicrystal Films by Laser Ablation Method
- 1 May 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (5B) , L736
- https://doi.org/10.1143/jjap.33.l736
Abstract
Al–Pd–Mn quasicrystal thin films were prepared by KrF excimer laser ablation for the first time, to our knowledge. The thin films were obtained only when the substrate temperature was lowered to liquid nitrogen temperatures during ablation. The composition of the films was found to agree with that of the target material within a few percent, regardless of the substrate temperature in the rang from -196°C to 300°C.Keywords
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