Preparation of Superconducting Bi-Sr-Ca-Cu-O Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

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Abstract
The Bi2Sr2CuO x and Bi2Sr2CaCu2O x films are prepared on single-crystalline SrTiO3 (100) at 650°C by the plasma assisted organometallic chemical vapor deposition method. There are only (00l) reflections in the X-ray diffraction patterns of these films. This indicates that the c axes of these films are oriented preferentially perpendicular to the substrate surface. The Bi2Sr2CaCu2O x films prepared in 1 Pa are semiconductive, while the films prepared in 100 Pa exhibit onset T c at 63 K.