Space- and direction-resolved Langmuir probe diagnostic in rf planar discharges
- 1 June 1992
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 12 (2) , 103-128
- https://doi.org/10.1007/bf01447441
Abstract
No abstract availableKeywords
This publication has 36 references indexed in Scilit:
- Scaling laws for radio frequency glow discharges for dry etchingJournal of Vacuum Science & Technology A, 1990
- Self-consistent kinetic model of the cathode fall of a glow dischargePhysical Review A, 1989
- Theoretical analysis of the electrode sheath in rf dischargesJournal of Applied Physics, 1989
- Time-Resolved Electron Energy Distribution Function Measurements in a Low-Frequency r.f. Glow DischargeEurophysics Letters, 1989
- Langmuir Probe Characterization of a RF Discharge Excited in Ar/C2F3Cl Mixtures during Plasma Deposition ProcessesContributions to Plasma Physics, 1989
- Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar dischargesPlasma Chemistry and Plasma Processing, 1988
- Probe measurements of the electron collision integrals in plasmasJournal of Physics B: Atomic and Molecular Physics, 1987
- An electrostatic probe technique for RF plasmaJournal of Physics E: Scientific Instruments, 1987
- Electron Kinetics of Weakly Ionized HF Plasmas I. Direct Treatment and Fourier ExpansionContributions to Plasma Physics, 1984
- The Influence of the Fluctuation Amplitude on the Probe CharacteristicContributions to Plasma Physics, 1983