Magnetically driven microstructures fabricated with multilayer electroplating
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 98-103
- https://doi.org/10.1016/0924-4247(94)00870-n
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplatingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of perfectly three-dimensional microstructures by UV depth lithographyPublished by SPIE-Intl Soc Optical Eng ,1994
- Galvanoplated 3D structures for micro systemsMicroelectronic Engineering, 1994
- Selectively released microstructures electroplated into thick positive photoresistJournal of Micromechanics and Microengineering, 1993
- Fabrication of magnetic microstructures by using thick layer resistsMicroelectronic Engineering, 1993
- Microactuators with moving magnets for linear, torsional or multiaxial motionSensors and Actuators A: Physical, 1992
- High depth to width aspect ratios in thick positive photoresist layers using near UV lithographyMicroelectronic Engineering, 1992
- Fabrication of high depth-to-width aspect ratio microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- Microfabricated actuator with moving permanent magnetPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991