Optical Filter for Fabricating Self-Aligned Amorphous Si TFTS
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A Fully Self-Aligned Amorphous Silicon Tft Technology for Large Area Image Sensors and Active-Matrix DisplaysMRS Proceedings, 1998
- Hybrid Amorphous and Polycrystalline Silicon Devices for Large-Area ElectronicsMRS Proceedings, 1998
- An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistorsJournal of Applied Physics, 1992
- A New Self-Aligned A-SI TFT Using Ion Doping and Chromium Silicide FormationMRS Proceedings, 1991