Depth resolution of multilayer Cr/Ni thin film structures deposited on substrates with different roughness
- 1 January 1987
- Vol. 37 (1-2) , 169-173
- https://doi.org/10.1016/0042-207x(87)90110-2
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Multiple-point depth profiling of multilayer Cr/Ni thin film structures on a rough substrate using scanning auger microscopyThin Solid Films, 1985
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- Quantitative depth profiling in surface analysis: A reviewSurface and Interface Analysis, 1980
- Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopyThin Solid Films, 1977
- Influence of ion bombardment on depth resolution in Auger electron spectroscopy analysis of thin gold films on nickelThin Solid Films, 1976
- Sputtering—a review of some recent experimental and theoretical aspectsApplied Physics A, 1975