Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopy
- 1 June 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 43 (3) , 275-283
- https://doi.org/10.1016/0040-6090(77)90289-9
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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