Accurate microcrystallography at high spatial resolution using electron back-scattering patterns in a field emission gun scanning electron microscope

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Abstract
Electron back-scattering patterns (EBSPS) have been obtained in a field emission gun scanning electron microscope, and the crystallographic information they contain has been shown to come from a small volume <or approximately=20*80*10 nm. A small angle back-scattered electron detector has been used to take pictures with enhanced crystallographic contrast, and is capable of clearly delineating sub-grain boundaries in a Ni (100) crystal with misorientations of order 0.5 degrees . The EBSP technique has been applied to determine epitaxial orientation relationships between sub- mu m crystals grown in situ on a single crystal substrate (Ag/W (110)) with an accuracy of +or-0.3 degrees .