Comparative study of thin poly-Si films grown by ion implantation and annealing with spectroscopic ellipsometry, Raman spectroscopy, and electron microscopy
- 15 October 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (8) , 3648-3658
- https://doi.org/10.1063/1.352308
Abstract
No abstract availableThis publication has 30 references indexed in Scilit:
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