A sims study of the adsorption of oxygen on ion-bombarded silicon(111) surfaces
- 31 May 1980
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 5 (1) , 65-72
- https://doi.org/10.1016/0378-5963(80)90118-x
Abstract
No abstract availableKeywords
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- Study of silicon-oxygen interaction with the statical method of secondary ion mass spectroscopy (SIMS)Applied Physics Letters, 1973