Short-cavity edge-emitting lasers with deeply etcheddistributed Bragg mirrors

Abstract
Short-cavity edge-emitting lasers with deeply etched distributed Bragg reflectors (DBRs) of third and second order were realised by reactive ion etching on GaInAs/AlGaAs layer structures. Diffraction limited reflectivities were achieved for third order dry etched DBR mirrors. Devices with DBRs on both cavity ends allow lasing operation for cavity lengths as short as 40 µm.