The nature of titanium-containing films formed on polymer surfaces by reactions of sorbed water with TiCl4
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 6 (1-4) , 381-392
- https://doi.org/10.1016/0167-9317(87)90063-3
Abstract
No abstract availableKeywords
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