Optimizing optical properties of reactively sputtered titanium nitride films
- 1 April 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 186 (1) , 15-26
- https://doi.org/10.1016/0040-6090(90)90495-y
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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