A comparative study of C plus Al coimplantation and Al implantation in 4Hand 6H-SiC
- 1 March 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 46 (3) , 612-619
- https://doi.org/10.1109/16.748886
Abstract
No abstract availableKeywords
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