Effect of Multiply Charged Ions on the Vickers Hardness of TiC Films
- 1 February 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (2R)
- https://doi.org/10.1143/jjap.38.881
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The Effect of Multiply Charged Ions on the Vickers Hardness of (Ti,Al)N FilmsJapanese Journal of Applied Physics, 1998
- Multiply Charged Ions by Constant Voltage Arc Ion Plating and Its ApplicationsJapanese Journal of Applied Physics, 1997
- Reduction in macroparticles during the deposition of TiN films prepared by arc ion platingSurface and Coatings Technology, 1990
- Technical note: A review of cathodic arc plasma deposition processes and their applicationsSurface and Coatings Technology, 1987
- Cathodic arc deposition technologySurface and Coatings Technology, 1986
- Erosion and ionization in the cathode spot regions of vacuum arcsJournal of Applied Physics, 1973