A surface micromachined capacitive absolute pressure sensor array on a glass substrate
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 125-128
- https://doi.org/10.1016/0924-4247(94)00874-h
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Capacitive sensors: When and how to use themPublished by Elsevier ,2002
- An integrated air-gap-capacitor pressure sensor and digital readout with sub-100 attofarad resolutionJournal of Microelectromechanical Systems, 1992
- Surface micromachined pressure transducersSensors and Actuators A: Physical, 1991
- Over-range behavior of sealed-cavity polysilicon pressure sensorsSensors and Actuators A: Physical, 1991
- Investigations on free-standing polysilicon beams in view of their application as transducersSensors and Actuators A: Physical, 1990
- Fabrication of micromechanical devices from polysilicon films with smooth surfacesSensors and Actuators, 1989
- Scaling limits in batch-fabricated silicon pressure sensorsIEEE Transactions on Electron Devices, 1987
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979